23rd Annual BACUS Symposium on Photomask Technology : 9-12 September 2003, Monterey, California, USA. P. 1 / Kurt R. Kimmel, Wolfgang Staud, chairs/editors
Symposium on Photomask Technology(23 : 2003 : Monterey)
Kimmel, Kurt R.(redaktör/utgivare)
Staud, Wolfgang(redaktör/utgivare)
ISBN 0-8194-5143-6
Cop. 2003
Engelska 700 s.
Serie: Proceedings of the Society of Photo-Optical Instrumentation Engineers, 99-0108644-2 ; 5256