Modifying the nanostructure and the mechanical properties of Mo2BC hard coatings [Elektronisk resurs] Influence of substrate temperature during magnetron sputtering

• A reduction in synthesis temperature is favorable for hard coatings, which are designed for industrial applications, as manufacturing costs can be saved and technologically relevant substrate materials are often temperature-sensitive. In this study, we analyzed Mo2BC hard coatings deposited by direct current magnetron sputtering at different substrate temperatures, ranging from 380 degrees C to 630 degrees C. Transmission electron microscopy investigations revealed that a dense structure of columnar grains, which formed at a substrate temperature of 630 degrees C, continuously diminishes with decreasing substrate temperature. It almost vanishes in the coating deposited at 380 degrees C, which shows nanocrystals of similar to 1 nm in diameter embedded in an amorphous matrix. Moreover, Argon from the deposition process is incorporated in the film and its amount increases with decreasing substrate temperature. Nanoindentation experiments provided evidence that hardness and Young's modulus are modified by the nanostructure of the analyzed Mo2BC coatings. A substrate temperature rise from 380 degrees C to 630 degrees C resulted in an increase in hardness (21 GPa to 28 GPa) and Young's modulus (259 GPa to 462 GPa). We conclude that the substrate temperature determines the nanostructure and the associated changes in bond strength and stiffness and thus, influences hardness and Young's modulus of the coatings. 

Ämnesord

Natural Sciences  (hsv)

Chemical Sciences  (hsv)

Materials Chemistry  (hsv)

Naturvetenskap  (hsv)

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Materialkemi  (hsv)

Indexterm och SAB-rubrik

Mo2BC hard coating

Direct current magnetron sputtering

Substrate temperature

Transmission electron microscopy

Nanostructure evolution

Mechanical properties